We are all aware of the tight relationship between the technological development trend of target materials and the development trend of target preparation. The target technology should adapt in line with how the application industry advances the technology of thin film goods or components.Let's follow the editor to discover how the target was prepared.
1. To create mechanical composite powder, blend monomer indium oxide powder with monomer tin oxide powder at a mass ratio of 9:1, or first create indium tin oxide chemical composite powder using chemical procedures.The powder is 99% pure, spherical or quasi-spherical, with an average particle size of 30-200 nm and no evidence of hard agglomeration.
2. Deoxidize the composite powder at 350°C in an oxygen environment.
3. Fill the envelope with the composite powder for cold isostatic pressing.Oil is used as the cold isostatic pressing medium, and a pressure range of 200 to 280 MPa is used.The rough density that was obtained ranges from 45% to 55% of the theoretical density.
4. Place the rough billet inside a container that is the appropriate size.To stop them from reacting at high temperatures and pressure, a metal tantalum film, nickel film, niobium film, or platinum film is placed between the container and the rough body.
5. Vacuum the container and encase it with rough blanks.
6. Insert the aforementioned container into a hot isostatic pressing furnace.With a holding period of 0.5–6 hours and an argon atmosphere pressure of 100–120 MPa, hot isostatic pressing takes place at temperatures between 100 and 300 °C.
7. Remove the carbon steel container after hot isostatic pressing by pickling in diluted nitric acid, peel off the metal foil barrier, and collect the desired material.
8. To cut the target material to the desired size, use the wire cutting method.
