What types of target materials are there-Part one

What are the target materials?

Target is actually a broad concept. There are three ways to classify target materials:

1. According to the external dimensions, it can be divided into cylindrical, rectangular, square plate targets and tube targets. According to the material, the target materials can be divided into metal targets, polymer ceramic non-metal targets and alloy targets, etc.;

2. According to the material, the target materials can be divided into conventional metal targets, precious metal targets, rare earth metal targets, non-metal targets, alloy sputtering targets, ceramic sputtering targets, etc.;

3. According to the application field, it can be divided into targets for semiconductors, targets for display panels, targets for solar cells, targets for magnetic recording, etc.

Classification by target shape

Common targets are mostly square targets and round targets, which are solid targets. In the coating operation, the magnetic field generated by the circular permanent magnet on the surface of the target is annular, uneven erosion will occur, the thickness uniformity of the sputtered film is not good, and the utilization efficiency of the target is only about 20% to 30%. The hollow tube target currently being promoted can rotate around a fixed bar magnet assembly for a certain period of time, and the 360°target surface can be evenly etched, which has obvious advantages and increases the utilization rate to 80%.

Classification by target material

Conventional metal targets: