Niobium Tube Target

Nb205 film has excellent optical properties, its optical waveguide loss is small, and it is widely used in waveguide SHG (second-harmonic generation) devices. Because Nb205 film has a strong ultraviolet absorption capacity, it can be used as a protective film for ultraviolet-sensitive materials. Due to the high refractive index of Nb205 film, films with different refractive indices can be prepared with Si02. In recent years, Nb205 film, as an electrochromic material with excellent performance, has aroused extensive interest among researchers.

Nb205 film is more and more widely used, and the demand for Nb targets is increasing, in view of the high price of Nb, and easy oxidation, so it is very necessary to develop a low-cost, large-size, environmentally friendly, and pollution-free production method of niobium tube targets. At present, there are two main methods for manufacturing niobium tube targets, the forging method, and the envelope extrusion method.

(1) Forging method: the vacuum-smelted niobium ingots are heated and forged, the outer circle is forged to the outer diameter of the required tube blank, and then the inner diameter is processed to the specified size by mechanical processing. The advantage of this method is that the process is simple and easy to implement; The disadvantages of this method are low material utilization, high cost, affected by the machining of the inner hole, and the length of the finished product is limited.

(2) Cover extrusion method: such as the method described in the patent application with publication number CN102489951A: using hollow smelted niobium ingots, the inner hole is machined (the inner hole size is slightly larger than the inner diameter of the finished niobium tube, such as the inner diameter of the finished niobium tube is 128mm, and the inner hole is 135mm), covering, heating, extrusion, pickling (removing the cover skin), heat treatment, mechanical processing into a finished product. The advantage of this method is that it can produce niobium tube targets of various specifications and sizes, with fine and uniform grains; The disadvantages of this method are that the process flow is long, the process is complex, the size of the inner hole is too approximate, the material utilization rate is low, the cost is high, and the pickling is polluting to the environment.

The Ni tube target obtained by our company using a new process method is especially suitable for magnetron sputtering, which has the advantages of simple process, high material utilization, low production cost, environmental protection, and pollution-free. Customers who need Ni tube targets can contact us at any time.

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