Niobium Oxide Rotating Target

At present, the most used on the market is the niobium oxide planar target, although the preparation technology of planar targets is becoming more and more mature, the utilization rate of planar targets in the use process is only 20-30%, that is, most the target is wasted, thereby virtually increasing the production cost. In order to improve the utilization rate of the target material and reduce the production cost of the enterprise, people began to study new target types and found that the utilization rate of the rotating target is very high, which can reach 70-80%, and the high utilization rate can reduce the cost of downstream products, while being more environmentally friendly and saving materials.

At present, the production of niobium oxide rotating targets mainly adopts a spraying process, and the target produced by this process is less dense, generally, less than 80%, which is easy to cause ignition and slag in the process of use, which in turn affects the quality and yield of downstream products; Moreover, limited by the size of the hot press furnace and the size of the graphite mold, the height of the niobium target prepared by the hot pressing method is small, generally less than 100mm, and for the rotating leather E with a length of 1500_, it is usually necessary to splice 15 tube targets with a height of 10mm before it can be used, resulting in more seams and affecting the quality of the coating product. Due to the above shortcomings, some manufacturers with high requirements for sputtering quality in the market use foreign rotating targets, which are high cost and are often subject to people. Therefore, it is urgent to develop a process for preparing highly compact rotating targets to meet the current expanding market demand.

Our company can overcome the shortcomings of existing technology and provide a niobium oxide rotating target with high density and good conductivity. By nano-treating, the raw material powder, the particle size of the metal niobium powder is significantly reduced, and the distribution of the metal niobium powder in the niobium oxide powder is more uniform so that the conductivity of the target material is higher. In addition, the atmosphere sintering treatment step is adopted to further increase the density of the target material by segmented heating. In addition, the thickness of the target blank can be freely set according to the requirements, and there is no need for a sectioning process like the target blank prepared by the hot pressing method, which can greatly improve production efficiency; Moreover, compared with the hot pressing method to prepare niobium oxide rotating targets, which are susceptible to the defects of the height of the target material < 10mm due to the limitation of equipment size, this method is not affected by the size of the equipment, and different sizes of targets can be obtained by using different molds, and the height of the target material can reach more than 300mm.

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